ADVANCED IGNITION OF REMOTE PLASMA SOURCES

PublishTime：2022-11-01

This paper describes the advantages of Advanced Energy’s Xstream®, which utilizes pulsed power for ignition and a transformer induced power delivery system during chamber cleaning operations. Advanced Energy has designed Xstream’s pulsed power with multiple igniters (as opposed to a single-igniter design) to optimize error-free ignition, even during cold starts. We also employ a dual-transformer induced power delivery system to the main power system that enables stable transition from ignition mode to operation mode. Finally, Xstream’s multiple segments of electrodes extend chamber life by distributing voltage load across the plasma chamber.

Brand of Product：	Advanced Energy
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Product Category：	More
Application：	More
Data Type：	White Paper More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
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Language：	English Chinese Chinese and English Japanese
Date of Creation：	2018/11/8
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Data Size：	938 KB

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