Advanced Vacuum Measurement Solutions Product Selection Guide

2022-04-21
●Users worldwide turn to MKS Instruments for reliable, precise and dependable vacuum measurement technology. MKS vacuum gauges, electronics, modular vacuum products, and tailored solutions provide the flexibility, reliability, and precise performance that are essential for your application. The MKS line of vacuum measurement products, that measure from 10-11 to 1500 Torr, offers the best and broadest range of vacuum and pressure measurement solutions.
●Our vacuum gauges, transducers, sensors and controllers are based on multiple pressure measurement technologies including Convectron®, Micro-Ion®, MicroPirani™, Piezo hot and cold cathode, Stabil-Ion®, and MEMS-based multi-sensor technology. These vacuum gauge and transducer products are used individually or integrated in combination, providing a wide variety of pressure and vacuum measurement options in terms of gas independence, covered pressure ranges and tolerance to aggressive gases.
●If your vacuum systems are used for semiconductor process tools, analytical instruments, educational or governmental research, or industrial processes, you face an assortment of challenges. MKS is the solution—providing accuracy, stability and dependability to improve the quality and productivity of your vacuum processes.

MKS Instruments

Series 360360Series 370370Series 355355Series 358358Series 392392Series 390390Series 274274Series 307307Series 350350Series 970B970BSeries 500500422423431901P910925275971B972B974B835307.475PDR900946Series 275Series 901PSeries 902B902BSeries 910Series 925Series 937B937BSeries 946Series PDR900Series 835Series 475

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Stabil-Ion GaugesMicro-Ion ControllersMicro-Ion Spinning Rotor GaugeMicro-Ion GaugesMicro-Ion Gauges TransducersBayard-Alpert Vacuum GaugesBayard-Alpert Vacuum ControllersCold Cathode GaugesCold Cathode TransducersMini-ConvectronMini-Convectron GaugesMini-ControllersMini-TransducersMicroPirani TransducersPiezo TransducersCombination GaugeSystem ControllersVacuum Quality Monitor (VQM) SystemsStabil-Ion® Vacuum Measurement SystemSpinning Rotor Gauge SystemMiniature Bayard-Alpert GaugesMicro-Ion® Vacuum Gauge ControllerMicro-Ion® ModulesTMicro-Ion® Modules ransducersGlass GaugesNude B-A GaugesUHV ControllersCold Cathode TransducerCold Cathode GaugeI-Mag® Cold Cathode Vacuum SensorsVacuum Gauge TransducersVacuum Gauge ModulesVacuum GaugesVacuum Gauge ControllersMini-Convectron® TransducersConvectron® Vacuum GaugeConvectron® Gauge ControllerMicroPirani™ Loadlock TransducerPiezo Loadlock TransducerAbsolute Piezo TransducerDualTrans™ MicroPirani™ TransducerMicroPirani™ TransducerDigital Combination Vacuum Gauge SystemVacuum System ControllerControllerGaugesTransducerVacuum Quality Monitor (VQM®) SystemsVQM® Mass Spectrometer SystemVQM® Differential Pump SystemSRG

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Advanced Vacuum Measurement ]semiconductor ]analytical ]research ]industrial ]

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Selection guide

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