SEMOZON® AX8580 Fully Integrated Modular Ozone Delivery System

PublishTime：2022-04-18

■The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD. This standalone, fully integrated modular ozone system can be equipped with up to (4) AX8415 generators and configured as a multi-channel system to deliver ozone for up to 4 channels, supporting multiple chambers or multiple tools. Flow rates of up to 50 slm per channel and concentrations greater than 400 g/Nm3 are achievable at peak system configuration. Also offered is an optional in-rack chiller for ultra-high concentrations and extended generator lifetime.
●Features & Benefits
■Fully integrated, modular system equipped with up to (4) AX8415 generators for the highest concentration at the highest flow
■Individually controlled generator outputs support up to (4) channels or combined into a single channel chamber process tool
■Highest ozone concentrations >400g/Nm3 at the highest flow rates for improved thin film quality
■Improved operating performance and extended lifetime due to cooling improvements and optional in-rack chiller
■Compatible with or without nitrogen for ultra-clean ozone
■Optional integrated ozone destruct for protection from unintended ozone exposure

Brand of Product：	MKS Instruments
Part#：	AX8580 、 AX8415 More Part#
Product Category：	Fully Integrated Modular Ozone Delivery System More
Application：	[ semiconductor process applications ][ ALD ][ CVD ][ TEOS ][ Ozone CVD ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2/18
Version Number：
Data Encoding：
Data Size：	633 KB

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