AX2600 & AX2700 MICROWAVE PLASMA DELIVERY SUBSYTEMS

PublishTime：2022-04-18

■The AX2600 and AX2700 Series Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, the highly reliable, field-proven AX2600 and AX2700 Series plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
■The AX2600 Series is a fully integrated, “packaged” solution designed for easy on-chamber integration. The AX2600 system includes the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and the patented AX7610 Microwave Applicator.
■The AX2700 Series, provided in kit form, consists of all components necessary for microwave plasma processing and is ideal for customers looking to optimize placement of the individual components on a system. All AX2700 system components are highly reliable, factory tested, and field-proven.
●Features & Benefits
■Performance
▲Fully automatic for hands-off operation
▲Accurate power measurement, closed-loop control and automatic plasma tuning ensure high accuracy and repeatability for improved yield
▲Precise microwave generator with closed-loop control power regulation for optimal wafer to wafer processing
▲Power Accuracy: < #1 .5% of maximum power (20%- 100% P.)
▲Delivers high productivity with fast tune times< 1 sec in various chemistries
■Flexibility
▲Microwave plasma sources, available for fluorine or non- fluorine chemistries, are designed for high power with multiple gases, flows and pressure ranges
▲Subsystems are lid mountable and configurable to accommodate available
chamber real estate
▲Process changes are handled by the flexible system software and require no hardware modification.
▲Quartz and Sapphire version to adapt multiple chemistries
■Reliability
▲MKS microwave plasma subsystems are fully integrated and tested for true turnkey implementation
▲Components have been optimized for long life, reducing CoO
▲Based on MKS's highly reliable, field-proven technology, MTBF exceeds 100,000
▲Secure operations with analog control and remote only versions

Brand of Product：	MKS Instruments
Part#：	AX2600 、 AX2700 、 AX2600 Series 、 AX2700 Series 、 AX2500 More Part#
Product Category：	Microwave Plasma Delivery Subsystems More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	11/17
Version Number：
Data Encoding：
Data Size：	217 KB

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