AX2600 & AX2700 MICROWAVE PLASMA DELIVERY SUBSYTEMS
■The AX2600 Series is a fully integrated, “packaged” solution designed for easy on-chamber integration. The AX2600 system includes the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and the patented AX7610 Microwave Applicator.
■The AX2700 Series, provided in kit form, consists of all components necessary for microwave plasma processing and is ideal for customers looking to optimize placement of the individual components on a system. All AX2700 system components are highly reliable, factory tested, and field-proven.
●Features & Benefits
■Performance
▲Fully automatic for hands-off operation
▲Accurate power measurement, closed-loop control and automatic plasma tuning ensure high accuracy and repeatability for improved yield
▲Precise microwave generator with closed-loop control power regulation for optimal wafer to wafer processing
▲Power Accuracy: < #1 .5% of maximum power (20%- 100% P.)
▲Delivers high productivity with fast tune times< 1 sec in various chemistries
■Flexibility
▲Microwave plasma sources, available for fluorine or non- fluorine chemistries, are designed for high power with multiple gases, flows and pressure ranges
▲Subsystems are lid mountable and configurable to accommodate available
chamber real estate
▲Process changes are handled by the flexible system software and require no hardware modification.
▲Quartz and Sapphire version to adapt multiple chemistries
■Reliability
▲MKS microwave plasma subsystems are fully integrated and tested for true turnkey implementation
▲Components have been optimized for long life, reducing CoO
▲Based on MKS's highly reliable, field-proven technology, MTBF exceeds 100,000
▲Secure operations with analog control and remote only versions
AX2600 、 AX2700 、 AX2600 Series 、 AX2700 Series 、 AX2500 |
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Datasheet |
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Please see the document for details |
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