AX7710MKS-01 Paragon Intelligent Remote Plasma Source 8 SLM, NF3 Flow

PublishTime：2022-04-18

■Building on the production-proven attributes of the MKS low-field toroidal plasma source, the Paragon® offers improved data transfer and control to enable the next generation of nano process development and manufacturing.
■For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
■The Paragon remote plasma source is available with both analog and EtherCAT® communication ports. EtherCAT can be used for direct control of the Paragon, or in combination with the analog port, as a data monitoring port only. The Paragon streams intelligent data sets to the tool or fab database to monitor or modify operating parameters to keep process tools running at peak efficiency and to support diagnostics (APC, FDC) applications.
●Product Features
■Best in Class dissociation (>98%) for efficient uniform cleaning results
■EtherCAT intelligent data reporting for faster, tighter device operation to support OEM and fab diagnostics
■Compatible with O2 and NF3 mixed gases
●Key Benefits
■Up to 8 slm NF flow, in a compact size enables faster clean times
■Proprietary PEO plasma block design offers greater process performance and extended time to maintenance

Brand of Product：	MKS Instruments
Part#：	AX7710MKS-01 、 P08NFP More Part#
Product Category：	Paragon Intelligent Remote Plasma Source More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	12/21
Version Number：
Data Encoding：
Data Size：	1.9 MB

Data section preview(2pages)

- The full preview is over,the data is 2 pages -

Download

+1 Like
Add to Favorites

Recommend

Technical Resources

More>

All reproduced articles on this site are for the purpose of conveying more information and clearly indicate the source. If media or individuals who do not want to be reproduced can contact us, which will be deleted.

Integrated Circuits