SOLVIX ARC AND BIAS SERIES: CATHODIC ARC DEPOSITION WITH PRECISE PROCESS CONTROL AND SUPERIOR FILM QUALITY

PublishTime：2022-03-14

●The Solvix® by AE® arc-bias solution brings a new level of precision and productivity to cathodic arc processes. Powerful arc discharges, rapid vaporization of target material, and high-energy ions make cathodic arc deposition both powerful and potentially unstable. Available at a range of current levels up to 400 A, Solvix by AE arc supplies deliver excellent plasma ionization, ion energy, and throughput — with remarkable power and process control. Solvix by AE bias supplies add an even greater degree of control over film properties, for remarkably hard, dense, durable, adherent films.
●Product Highlights
■Power and process control
■Better film density and adhesion
■R educed target damage
■Proven reliability
■Reduced substrate damage and better yield
■Adaptability to a wide range of process requirements
■High throughput
■Efficient installation and service
■DC and pulsed-DC units
■Current, power, and voltage regulation modes
■Flexible architecture
■Air cooling
■Multiple units configurable for high-power requirements
■High-performance DSP regulator

Brand of Product：	Advanced Energy
Part#：
Product Category：	More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2018/5/8
Version Number：
Data Encoding：	ENG-SolvixArcBias-231-03
Data Size：	485 KB

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