C10346-01 Multiband plasma-process monitor
●Monitoring Plasma (Emission Spectrum) in Real-Time.
●C10346-01 is a monitoring system to detect wide spectrum plasma emission during the process of etching, spattering and CVD in semiconductor manufacturing.
●With the various analysis functions, it can be used for setting up end-point detection conditions and automatic detection of etching and cleaning, estimation of plasma species and monitoring (plasma) contamination and abnormal discharges.
●Features:
■Simultaneous measurements of wide (plasma) spectrum
▲Captures wide spectrum (emission) from (plasma) radicals or ions.
▲C10346-01 : 200 nm to 950 nm
■Real-time plasma (emission) measurement
▲Continuously measures up to 15 000 spectra at an interval of 20 ms(50 ms with concurrent running of detection software)
■Highly accurate and reliable measurements
▲A high resolution spectrometer and a ultra-high sensitive photo detector are firmly locked in position to assure the acquisition of accurate spectrum and precise spectrum responsivity data through sharply focused plasma emission spectrum images.
■High-sensitivity detection in UV spectrum region
▲Detects the UV spectrum region from 200 nm with high sensitivity.
■Easy measurement using optical fibers
▲The equipped optical fiber can be easily attached to plasma chambers through a SMA connector widely used.
■Operation with multiple chambers
▲A single analysis unit can control up to four C10346-01 Multiband plasma-process monitor via a USB 2.0 interface.
■Data acquisition software
▲The data acquisition software stores the spectrum data into the database during plasma process. This stored data can then be used for spectrum data calculations.
■Optional software
▲High sensitive endpoint detection and real-time monitoring of process abnormality are achieved by creating ''detection model''.
|
[ Easy parameter evaluations to detect etching and cleaning endpoints ][ Estimation of plasma species during process ][ Automatic detection of etching and cleaning endpoints ][ Impurity and abnormal discharge monitoring ] |
|
|
Datasheet |
|
|
|
|
Please see the document for details |
|
|
|
|
|
|
|
|
|
|
|
English Chinese Chinese and English Japanese |
|
|
OCT/2020 |
|
|
|
|
|
SSMS0031E07 |
|
|
1.9 MB |
- +1 Like
- Add to Favorites
Recommend
- Sunlord Mini Size SDNT Multilayer NTC Thermistor—SDNT0402 Series with High-precision Resistance, High-precision B-value
- 需要充电吗？具有开尔文源引脚的SiC MOSFET DIF120SIC053-AQ加速电动汽车充电过程
- ept One27® SMT PCB Connectors with a Pitch of 1.27mm is Suitable for Board-to-board Applications ∣ video
- The Installation Advantages, Structural Features and Product Applications of WAGO‘s 2273 Series Compact Wire Connectors ∣ Video
- Greenconn荣获邓白氏企业认证，实力彰显行业领先水平
- IS6630A/C/D with Three-way Output Enables DDR Power Supply Integration, Saving the Space on the PCB Board And the Required Devices
- RARA Would Like to Give Customers a “One-stop Solution” with All Kinds of Resistive Products
- ELETE Press-fit With High Electrical Reliability, Suitable For Communications, Automotive Electronics, Medical And Other Industries
All reproduced articles on this site are for the purpose of conveying more information and clearly indicate the source. If media or individuals who do not want to be reproduced can contact us, which will be deleted.
Integrated Circuits
Discrete Components
Connectors & Structural Components
Assembly UnitModules & Accessories
Power Supplies & Power Modules
Electronic Materials
Instrumentation & Test Kit
Electrical Tools & Materials
Mechatronics
Processing & Customization
