U19 SERIES Ultra High Purity rEGULATOR

PublishTime：2025-03-19

GENTEC® U19系列单级Tied-Diaphragm高纯减压器严格按照SEMI要求制造，适用于半导体制程中的特种气体控制。该系列减压器采用316L或316L VAR不锈钢母体，不锈钢隔膜式结构，金属硬密封，膜片提动阀芯式结构，后座安装/面板安装可选。具有高输出压力稳定性，内部流道(湿润表面)符合SEMI标准要求制造。

Brand of Product：	捷锐
Part#：	U19SLBK-DHP-VSM4-E 、 U19SLAK-DGW-VSF4-E More Part#
Product Category：	高纯减压器 More
Application：	[ 半导体制程中的特种气体控制 ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
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Language：	English Chinese Chinese and English Japanese
Date of Creation：
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Data Size：	629 KB

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