MV30 SERIES METERING DIAPHRAGM VALVES

PublishTime：2025-03-19

GENTEC®MV30系列膜片式计量阀主要针对半导体制程设备高纯气体应用领域。该系列阀采用316L或316L VAR不锈钢材料制造，具有带刻度旋钮开关、FSR连接和经过氦气测试等特点。阀座材料为PCTFE，隔膜材料为Elgiloy®。流量系数为Cv=0.25，最大泄漏率为2x10-9 atm cc/sec He。工作条件为最大工作压力150 psi（10.3 bar），工作温度-10°C ~ 80°C (14℉~ 176℉)。

Brand of Product：	捷锐
Part#：	MV30 More Part#
Product Category：	膜片式计量阀 More
Application：	[ 半导体制程设备高纯气体应用 ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
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Language：	English Chinese Chinese and English Japanese
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Data Size：	435 KB

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