TCU Model 2080 Operation and Maintenance

2025-03-16
This document provides detailed information on the operation and maintenance of the TCU Model 2080, a dual channel temperature control unit designed for liquid heating/cooling systems. It covers the system's features, installation, start-up, maintenance, calibration, troubleshooting, and safety guidelines. The document also includes specifications, diagrams, and a list of required materials and equipment.

Trillium

TCU Model 2080

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Part#

Temperature Control Unit

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Semiconductor manufacturing equipment ]

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User's Guide

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Please see the document for details

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English Chinese Chinese and English Japanese

August 2001

Revision B

2 MB

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