On-Board® Cryopump Installation and Maintenance Instructions

PublishTime：2025-03-16

本文档提供了On-Board®低温泵的安装和维护指南。它详细介绍了低温泵的安全注意事项、安装步骤、操作和维护程序。文档还涵盖了低温泵的规格、工作原理、远程操作选项以及故障排除信息。此外，还包括了客户支持信息和索引。

Brand of Product：	Trillium
Part#：	On-Board® Cryopump More Part#
Product Category：	低温泵 More
Application：	[ 用于真空系统中的气体泵送，适用于10-3到10-9托尔范围的气体 ] More
Data Type：	Technical Documentation More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：	未知
Language：	English Chinese Chinese and English Japanese
Date of Creation：	02/03/04
Version Number：	Rev. 102, 02/03/04
Data Encoding：	8040491
Data Size：	1.1 MB

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