Cryo-Plex 8/8LP® Cryogenic High Vacuum Pump User’s Manual

2025-03-16
This manual provides instructions for the safe and efficient operation of the Cryo-Plex 8/8LP cryogenic vacuum pump. It covers the installation, operation, maintenance, and troubleshooting of the pump. The manual also includes specifications, ordering information, and safety warnings.

Trillium

Cryo-Plex 8/8LP

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Part#

Cryogenic High Vacuum Pump

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Sputtering tools ]ion implanters ]R&D bell-jar systems ]surface analysis ]accelerators ]beam lines ]general vacuum systems ]

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User's Guide

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Please see the document for details

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English Chinese Chinese and English Japanese

November 2015

Rev A / November 2015

97-00032-000

456 KB

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