Material Profile: Superior® 486 FFKM

PublishTime：2024-09-24

●Superior® 486 was specifically developed to be a cost-effective, high performance compound for semiconductor applications. Superior® 486 offers excellent plasma resistance and low particulation in a wide range of plasma environments.
●Features and Benefits
■ Excellent Plasma Resistance
■ Minimal Particulation
■ Wide chemical compatibility
■ High Physical Properties
■ Cost Effective

Brand of Product：	EKK
Part#：	Superior® 486 More Part#
Product Category：	White Perfluoroelastomer 、 FFKM Perfluoroelastomer 、 FFKM More
Application：	[ semiconductor ][ Deposition ][ CVD ][ APCVD ][ HDPCVD ][ PECVS ][ RPCVD ][ SACVD ][ Oxide ][ Metal ][ Ashing ][ Ion Implant ][ Metallization ][ PVD ][ Sputtering ][ Evaporation ][ Plasma Etch ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	20230612
Version Number：	REV01
Data Encoding：
Data Size：	245 KB

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