Material Profile: Superior™ F815

2024-09-24
●Superior F815 was specifically developed to be a cost-effective, high-performance compound for semiconductor applications. Superior F815 offers outstanding plasma resistance and low particulation in a wide range of plasma environments.
●Features and Benefits
■ Outstanding plasma resistance
■ Minimum particulation
■ Wide chemical resistance
■ High physical properties
■ Cost-effective

EKK

Superior F815

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Part#

Fluoroelastomer

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semiconductor ]

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Datasheet

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2021/2/13

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