LITHOGUARD® LPS FILTERS LENS PROTECTION SYSTEM
■THE ULTIMATE IN LENS PROTECTION SYSTEM TECHNOLOGY
●Since Donaldson first introduced broad spectrum filtration media to the semiconductor industry, tool manufacturers have become increasingly concerned about the presence of airborne silicon-containing organics and the resulting siloxane contamination to optical elements. To meet these increasingly complex and stringent demands, Donaldson developed LPS filtration technology which offers maximum protection against siloxanes, and longer filter life for the broadest spectrum of acid, base, and organic contaminants that can degrade tools and affect processes.
●Donaldson LPS’s two stage filtration system incorporates advanced media technology to deliver the longest life and highest efficiency in broad spectrum filtration. As part of the Donaldson Refill Program, LPS filters can be reused and refilled; which further lowers cost of ownership by reducing replacement and waste expenses. With refill locations around the world, Donaldson LPS can meet the filtration needs for your global business. When you need simply the best in contamination protection, you need Donaldson LPS.
■FEATURES & BENEFITS
●Greater than 99% removal efficiency for:
▲Acids (such as SO2, HCI, HBr)
▲Bases (NH3, NMP, amines)
▲Silicon-containing compounds (HMDSO, TMS)
●More capacity and longer life than filters of comparable size
●These filters are eligible for the Donaldson Refill Program
●Donaldson can provide life estimates based on your actual fab contaminant concentrations
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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07/19 |
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F117972 |
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536 KB |
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