LITHOGUARD® POINT-OF-USE FILTERS Semiconductor Filtration
■Lithoguard Point-of-Use (POU) filters provide reliable contaminant removal at the last possible moment before gas use.
■Designed for removal of acid, base, organic, and silicone containing compound contaminants; Donaldson LITHOGUARD® Point-of-Use (POU) filters are ideal for pressurized air, nitrogen, and other inert gases where extremely high purity is required.
■FEATURES & BENEFITS
●For use with Clean Dry Air (CDA), compressed air, N 2, and other inert gases
●Designed to remove acid, base, organic, and silicone containing compound contaminants to less than sub-ppb levels
●Filters provide particulate filtration in addition to chemical filtration
●Filters prepurged and ready for immediate installation
●Max operating pressure - 150 psi / 10 bar @ 65℃
●Filter housing made of Type 304 stainless steel for cleanliness
●Filters are available for various flow rates (See table on back.)
●Custom filters can be designed for your specific application
▲Various media options to suit specific requirements
▲Wide variety of standard fittings available
●Used filter analysis available
P516065 、 P511554 、 P517356 、 P511885 、 P512886 、 P510885 、 P510988 、 P513202 、 P512098 、 P510978 、 P510979 、 P516530 、 P516162 、 P515989 、 P516932 、 P515555 、 P516527 、 P516187 、 P512045 、 P512925 、 X009989 、 X009994 、 X009992 、 P510673 、 X009995 、 P510830 、 P513400 、 P513374 |
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POINT-OF-USE FILTERS 、 POU filters 、 stainless steel point-of-use filters |
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[ nitrogen ][ inert gases ][ pressurized air ] |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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07/19 |
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F117971 |
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512 KB |
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