LITHOGUARD® POINT-OF-USE FILTERS Semiconductor Filtration

2024-07-25

■Lithoguard Point-of-Use (POU) filters provide reliable contaminant removal at the last possible moment before gas use.

■Designed for removal of acid, base, organic, and silicone containing compound contaminants; Donaldson LITHOGUARD® Point-of-Use (POU) filters are ideal for pressurized air, nitrogen, and other inert gases where extremely high purity is required.

■FEATURES & BENEFITS

●For use with Clean Dry Air (CDA), compressed air, N 2, and other inert gases

●Designed to remove acid, base, organic, and silicone containing compound contaminants to less than sub-ppb levels

●Filters provide particulate filtration in addition to chemical filtration

●Filters prepurged and ready for immediate installation

●Max operating pressure - 150 psi / 10 bar @ 65℃

●Filter housing made of Type 304 stainless steel for cleanliness

●Filters are available for various flow rates (See table on back.)

●Custom filters can be designed for your specific application

▲Various media options to suit specific requirements

▲Wide variety of standard fittings available

●Used filter analysis available


Donaldson

P516065P511554P517356P511885P512886P510885P510988P513202P512098P510978P510979P516530P516162P515989P516932P515555P516527P516187P512045P512925X009989X009994X009992P510673X009995P510830P513400P513374

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Part#

POINT-OF-USE FILTERSPOU filtersstainless steel point-of-use filters

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nitrogen ]inert gases ]pressurized air ]

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Datasheet

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Please see the document for details

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07/19

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