COMPex Market Leading UV-Technology

2024-01-12
●COMPex Excimer lasers are highly effective light sources,featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD) and precise material processing.
●Featuring ceramic preionization, the COMPex provides multi-hundred millijoules output, plus unmatched pulse-to-pulse stability. The COMPex also comes with an improved gas processor that extends both gas and optics lifetimes.
●Features and Benefits
■Selection of 157 nm, 193 nm, 248 nm, 308 nm, and 351 nm wavelengths for full material flexibility
■Superior pulse energy of up to 750 mJ to enable effective ablation at large field size
■Unrivalled pulse stability of 0.75%, rms to ensure high fluence control
■Ultimate pulse control and system parameter logging to deliver smart and reproducible thin films

COHERENT

COMPex 205COMPexCOMPex 50COMPex 100COMPex 200/F2

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Excimer lasers

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PLD ]Pulsed Laser Deposition ]Thin Wafer Processing ]Laser Lift-Off ]Laser Debonding ]LA-ICP-MS ]solid sampling systems ]material research ]precise material processing ]

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0122

Rev.D

MC-021-16-0M0122

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