ACS Software Quick Start Guide
■ACS is a flexible, interactive software test environment designed for device characterization, parametric test, reliability test and even simple functional tests. The software supports semiconductor characterization at the cassette, wafer, and device level, using multiple test instruments and automatic parametric testing with semiautomatic and automatic probe stations.
■ACS software controls hardware on the Keithley Instruments Model 4200-SCS Semiconductor Characterization System, and supports other external instruments controlled through a GPIB, such as the Keithley Instruments Series 2600B, Model 2651A, and Model 2657A System SourceMeter instruments. It also provides a combined test-execution engine that supports Model 4200-SCS and Series 2600B group testing.
■ACS can perform multisite parallel I-V testing using a Series 2600B as the primary instrument. You can have as many as 16 groups of source-measure units (SMUs) on a single GPIB card, for a total of 16 parallel test sites (contact Keithley Instruments if you need more than 16 parallel sites). Each group can support up to 64 Series 2600B instruments, or 128 channels.
■ACS organizes tests in a hierarchal level that is consistent with semiconductor-wafer organization, allowing for a one-time setup when managing cassette-level tests:
▲Cassette: Automate multiple wafer tests
▲Wafer: Defi ne test patterns
▲Pattern: Multiple sites (nonexclusive) for each pattern
▲Device: Perform one or more tests (single or multi-group)
▲Subsite: Perform one or more tests on devices
▲Test modules: ITM, STM, PTM, and CTM
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User's Guide |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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March 2019 |
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Rev. E |
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ACS-903-01 |
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973 KB |
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