Making Femtofarad (1e-15F) Capacitance Measurements with the 4215-CVU Capacitance Voltage Unit
■Typical semiconductor capacitances are in the picofarad (pF) or nanofarad (nF) ranges. Many commercially available LCR or capacitance meters can measure these values using proper measurement techniques including compensation. However, some applications require very sensitive capacitance measurements in the femtofarad (fF), or 1e-15, range. These applications include measuring metal-to-metal capacitance, interconnect capacitance on a wafer, MEMS devices such as switches, or capacitance between terminals on nano devices. These very small capacitances are very difficult to measure without using the proper instrumentation and measurement techniques.
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Application note & Design Guide |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2020/4/3 |
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Rev. 02.2018 |
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1KW-61666-0 |
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780 KB |
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