High speed SEM-based defect review systems application note
SEM based semiconductor defect review system integrators are faced with the challenge of integrating sensors that have high resolution and high frame rates. Moreover, new intelligent machines with real-time adaptive process that enable more accurate defect classification also rely on faster and better data transfer.
●This means that these advanced systems have to transfer more data form the sensor to their computer. They also need a really reliable data link that will not introduce noise. For data integrity, link reliability, and error-free data transfer at rates superior to 10 Gbps, optical link becomes the only viable solution.
●Why choose Reflex Photonics optical transceivers
Reflex Photonics transceivers enable large amount of critical data to be moved from point A to point B in any industrial data intensive process. Our LightVISION VM embedded parallel optics can be operated at up to 120 Gbps and are tested to give BER under E-12 over the commercial grade temperature range (0 ºC to 85 ºC). These components ensure that data transfer will never be the bottle neck for complex real-time defect classification procedure.
The LightVISION VM embedded transceivers are used to transfer up to 120 Gbps from SEM defect review system sensor to the system microcontroller or computer. In addition, these embedded transceivers offer maximum flexibility in terms of board mounting options and facilitate board design. Reflex Photonics embedded transceivers have a strong track record with SEM-based wafer defect review system OEM.
●Benefits of using the industrial LightVISION VM
■Robust screw-in board-mounted optical module with reduced footprint suitable for harsh environment
■Bandwidth from 20G (2 TX or 2 RX lane) to 120G (12 TX or 12 RX lane)
■Performance of up to 10.3125 Gbps/channel
■Lightweight and easy to integrate optical cable
■Standard MPO parallel fiber connector
■Multimode 850 nm wavelength laser
■Flexible height adjustable with LGA interposer
■Rugged RoHS electrical interface
■Low power consumption: <100 mW per channel
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Photonics optical transceivers 、 MPO parallel fiber connector 、 wavelength laser 、 integrate optical cable |
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Application note & Design Guide |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2021 |
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Version 1.1 |
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555 KB |
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