Model OAI 800E: Enhanced Front and Backside Semi-automatic Mask Aligner

PublishTime：2024-11-18

■With over 4 decades of product development and manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of photolithography equipment designed for R&D and semi-automatic production. Built on the proven OAI modular platform, the Model 800E is an enhanced, high-performance high-resolution lithography system which delivers a level of performance that is unmatched at this price point. The aligners feature OAI’s Advanced Beam Optics offering exceptional uniformity. Upgradable with OAI’s Precision Lithography Modules, ther Model 800E is a versatile tool in the lab or in the field. The Model 800E utilizes Windows 10 control and recipe storage. It also comes with joystick controlled alignment and optics stages, and can be configured with non-contact 3-point wedge effect correction and auto-align capability. These combined features are typically found in more expensive mask aligners but are available for an affordable price on the Model 800E.
■Standard Frontside Features
●Dual 1MP resolution GIGE CCD cameras
●Substrates up to 8” square • masks to 9”x9”
●Windows PC controlled with recipe storage
●Motorized joystick for aliugnment and positioning
●Exposure modes: Vacuum, hard soft & proximity
●Auto Wedge Effect compensation
■Standard Backside Features
●All of the above, plus:
●2 additional cameras (4 total)
●Digital zoom
●Motorized backside optics focus

Brand of Product：	OAI
Part#：	Model OAI 800E 、 800E More Part#
Product Category：	Enhanced Front and Backside Semi-automatic Mask Aligner 、 aligners 、 an enhanced, high-performance high-resolution lithography system More
Application：	[ R&D ][ semi-automatic production ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2022/2/4
Version Number：
Data Encoding：
Data Size：	1.3 MB

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