Miniax XYZ Manipulator

PublishTime：2024-11-12

■The Miniax XYZ translator offers a source of simple, cost effective, manipulation. The single bellows construction makes it easy to use in any orientation. The micrometers are vacuum conditioned and do not need to be removed for bakeout.
■Product Overview
●XY travel of ±12.5 mm guided with cross roller bearings.
●Z travel options of 50mm or 100mm
●Bakeable to 200℃.
●Standard base flange is 152mm OD (NW100CF) with straddled clearance holes for mounting the translator.
●Four mini ports, tapped M4, are provided for service feedthroughs (152mm OD base flange only)
●Travelling flange 70mm OD (NW35CF) with M6 tapped holes, straddled about the Y axis
●An optional 70mm OD (NW35CF) base flange
●Double bolt holes on mounting flange.
●Operating pressure 1 bar to 10⁻¹¹ mbar
●Leak rate 1x10-10 mbar ls⁻¹
●XY Resolution 0.001 mm repeatability 0.005 mm
●Z Resolution 0.005 mm repeatability 0.010 mm

Brand of Product：	VACGEN
Part#：	ZXYZ0570 、 ZXYZ1070 、 ZXYZ0515 、 ZXYZ1015 More Part#
Product Category：	XYZ Manipulator 、 Translators More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2016/2/25
Version Number：
Data Encoding：
Data Size：	1.1 MB

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