RM-3 SERIES ROTARY STAGE
■The design takes advantage of a single preloaded crossed roller bearing for the table movement. This design approach eliminates the use of a dual bearing configuration thus improving on axial runout and wobble. The RM-3 rotary table utilizes a worm gear drive with available gear ratios of 90:1 and 45:1. The worm gear is preload to minimize the backlash in the gear train.
■The RM-3 is available as a vacuum compatible rotary stage. The vacuum compatible version uses a special stepper motor that has all paint and oils removed. The worm gear and bearings use a high vacuum grease. The leads from the motor utilizes a Teflon insulation. All aluminum stage parts have a clear iridite finish.
●FEATURES
■Resolution: Up to 0.29 arc-sec
■Speed: Up to 200°/sec
■Compact Size
■Size 17 motor
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RM-3 SERIES 、 RM-3 、 RM-3D-XXX |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2020/5/16 |
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3.5 MB |
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