PR1, PR2 series Ultra High Purity REGULATORS
■Specifications
●Max. Working Pressure: 10 bar (145 psig)
●Operating Pressure: 0.4~0.6 Mpa (58~87psig)
●Working Temperature: PCTFE: -10~80℃ (14~176℉)/ PFA, PI: -10~150℃ (14~302℉)
●Inboard Leak Test Rates (He) (Holding Time≥15sec.): ≤1x10⁻⁹ atm.cc/s
●Across the Seat Leak Test Rates(He) (Holding Time≥15sec.): ≤1x10⁻⁹ atm.cc/s
●Particle Inspection(EP Only) (0.1μm and Larger): No Count
PR1 series 、 PR1 、 PR2 series 、 PR2 、 SMPR1-VF4-0603-06C03-P 、 DMPR1-VF4-0603-B03 、 DMPR1-VM4-1010-10C16-P 、 SMPR1-VM4 、 SMPR1-VF4 、 SMPR1-S4 、 SMPR1-TW4 、 DMPR2-VM8-3525-40C-30-P 、 SMPR2-S8-0603-A 、 SMPR1-VM8 、 SMPR1-VF8 、 SMPR1-S8 、 SMPR1-TW8 |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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Jan 2022 |
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Ver. Jan 2022 |
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784 KB |
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