DLP® 光机引擎 (Industrial DLP® Projector Engine)
●产品特点
■采用激光光源，实现更高功率，比LED光效更高
■激光光源光学扩展量小，成像焦深大，对比度高
■η™ 结构专利设计，具有更紧凑的尺寸，便于设备配置多个扫描引擎，实现更大尺寸和更高分辨率的曝光图像；
■光纤耦合激光光源重量轻，可实现DLP引擎的高速运动和快速曝光；
■采用了多波长光源，通过调节各波长输出配比，可控制曝光光刻胶的侧壁形貌。
●Feature & Benefit
■Take advantage of Laser as light source, dedicated to higher power intensity and more efficiency than LED source;
■Laser source has smaller Etendue contribute to the larger depth of focus and higher contrast;
■Patented η™ optical path dedicated to the small size and arrow configuration, it can realize larger image and higher resolution by multi-head;
■DLP engine is able to fast move and quickly image because of using fiber coupling laser source to reduce the weight;
■Utilizing multiple wavelengths, the resist profile can be changed by controlling the ratio of the optical output of each wavelength.
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Laser-9500DLP 、 LED-9500DLP 、 Laser-6500DLP 、 9500 、 6500 |
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[ 增材制造 ][ 激光直写成像 ][ 半导体封装光刻 ][ MEMS加工 ][ 结构光三维扫描 ][ 阻焊曝光 ][ 线路曝光 ][ Additive Manufacturing ][ Laser Direct Imaging ][ LDI ][ solder resist layer processing ][ circuit resist layer processing ][ Semiconductor Packaging Lithography ][ MEMS Lithography ][ Structure-light 3D Scanning ] |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2024/3/15 |
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1.9 MB |
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