SFC5500 mass flow controller and SFM5500 mass flow meter Datasheet
● Very wide control and measurement range (<0.1% - 100% full scale)
● G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
● Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
● Digital interface with temperature-compensated output
● Ultra-fast settling time (<100 ms)
● Pressure resistance up to 10 bar
● Mean Time Between Failures (MTBF) 169 years
● No drift and no re-calibration required in the field
● NIST-traceable calibration
● EK-F5x evaluation kit for quick and easy testing
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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April 2022 |
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Version 3 |
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1.2 MB |
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