SFC5500 mass flow controller and SFM5500 mass flow meter Datasheet

2022-10-21
● Excellent accuracy and repeatability (0.8% / 0.1% of setpoint respectively)
● Very wide control and measurement range (<0.1% - 100% full scale)
● G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
● Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
● Digital interface with temperature-compensated output
● Ultra-fast settling time (<100 ms)
● Pressure resistance up to 10 bar
● Mean Time Between Failures (MTBF) 169 years
● No drift and no re-calibration required in the field
● NIST-traceable calibration
● EK-F5x evaluation kit for quick and easy testing

Sensirion

SFC5500SFM5500

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Part#

mass flow controllermass flow meter

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Datasheet

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April 2022

Version 3

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