ULTRAPUR™ TMB Trimethylborate
■Trimethylborate (TMB) is an organic boron ester compound widely used as a boron source in the deposition of doped silicate glass in low pressure, plasma-enhanced CVD. Boron and phosphorus act as glass flow temperature modifiers and gettering agents. The softening temperature of the silicate glass is modified with varying concentrations of doping constituents. The boron source of doped glass has traditionally been diborane.
■TMB has gained significant acceptance in these applications because of the ease of handling a liquid source, reduced health hazards, improved purity levels and improved performance character-istics. TMB is a liquid at room temperature and has a relatively high vapor pressure that allows for bubbling with a carrier gas, vacuum processing or direct liquid injection.
■Entegris offers TEB in an ultrapure grade which is purified using proprietary techniques allowing us to supply the most consistent, high-purity chemical available.
●Features and Benefits
■Ease of handling
■Reduced health hazards
■Improved purity levels
■Improved performance characteristics
■Standard shelf life 24 months
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/4/6 |
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559 KB |
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