Technical Data for Alicat BIOC-Series Mass Flow Controllers: 1 sccm of Full Scale through 5 sccm of Full Scale
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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September 13, 2019 |
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REV 0 |
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DOC-SPECS-BIOC-LOW |
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248 KB |
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