Retrofit: HFV to Paramount Plus MF Digitally Controlled RF Power Supply with Increased Reliability, Efficiency, and Functionality

PublishTime：2022-07-04

The Advanced Energy (AE) Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution. With a retrofit of your existing HFV unit to the Paramount Plus MF, Total Cost of Ownership improvements can be realized through reduced tool down time, improved process & wafer yields, and efficiency gains.
As semiconductor tools and process power components age, factories are seeing increases in failure rates and repair costs of those components. A retrofit of HFV to Paramount Plus MF provides a reset of the unit life, and an upgrade in unit capability and reliability. A retrofit maximizes tool uptime while reducing overall maintenance costs.
The HFV product line is no longer in production. Retrofitting your HFV generator is the preferred service option as:
●Used equipment available on the market is in unknown condition
●Repairing existing units could be limited in the future due to obsolete components
●Benefits
■Increased uptime with longer mean time between failures (MTBF)
■Lower overall maintenance costs
■Performance equivalent to processes with new tools
■Additional features allow for enhanced process control or new process development
■Higher efficiency
■Enhanced plasma stability and process repeatability
■CEX and pulsing options available
●Features
■Includes 12-month, whole-box warranty
■Supports wafer fabrication with partnership of AE refurbishment experts
■Resets the clock on aging tools
■Provides cost-effective, modern replacements for discontinued or aging plasma generators
■Presents an efficient upgrade process that is replicable for subsequent tools
■Retrofit kit designed to be a seamless drop-in replacement for HFV
■Improved data logging features enable monitoring of unit health and process trends
■Provides convenient access to system controls and diagnostics through Virtual Front Panel

Brand of Product：	Advanced Energy
Part#：	Paramount Plus MF 、 HFV More Part#
Product Category：	Digitally Controlled RF Power Supply More
Application：	More
Data Type：	Technical Documentation More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2019/7/10
Version Number：
Data Encoding：
Data Size：	190 KB

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