Implant Materials and Components

PublishTime：2022-07-04

●Regardless of the ion implant equipment or process chemistry, Entegris has a material solution for the components used along the beamline. Entegris’ family of materials provide the optimum performance/cost benefits for each area of the beam line.
●Entegris’ graphite components are used across all generations and types of implant equipment. Typical applications are elec-trodes, high wear beam defining parts, structural shielding parts, structural extraction hardware, source area parts, and analyzer magnet components

Brand of Product：	Entegris
Part#：
Product Category：	Implant Materials and Components More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
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Language：	English Chinese Chinese and English Japanese
Date of Creation：	2018/8/30
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Data Size：	608 KB

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