Monaco UV
Industrial UV Femtosecond Laser
Monaco UV is the ideal tool for high precision, ultra-low heat aected
zone (HAZ) laser processing. The 345 nm femtosecond laser is designed
and optimized to eciently match the femtosecond ablation thresholds
of materials. The matched energy in single pulse or seeder burst
mode, coupled with high repetition rates, drives 24/7 high-volume
manufacturing. The Monaco UV THG stage is built on the industrial
Monaco IR ber laser platform, and is designed to and tested under
the Coherent industry leading HASS/HALT reliability protocols. Monaco
UV sets the standard for high performance industrial femtosecond
laser machining.
FEATURES & BENEFITS
• 30 W, 800 kHz model for legacy ps
tool environments
• 25 W high rep rate model tailored to
material ablation thresholds
• 345 nm for ultra-low HAZ in thin films,
foils, and semiconductor wafers
• Proprietary integrated THG stage for
stable long-life UV output
• HALT/HASS testing protocols for
industry leading reliability
• PulseEQ pulse-on-demand for
constant pulse spacing in contour
cutting with stages and galvos
APPLICATIONS
• OLED Module and Contour Cutting
• Semiconductor Wafer Cutting
• Thin-Film and Foil Cutting
• Display Touch Sensor Cutting
• Flex Material Processing
Monaco UV Datasheet
OPTICAL SPECIFICATIONS
1
Monaco 345-20-25 Monaco 345-38-30
Fundamental Center Wavelength (nm) 345 ±2
Output Power (W) 25 30
Energy (µJ) 20 (1.25 MHz) 37.5 (800 kHz)
Repetition Rate (kHz) Single-Shot to 4 MHz
Pulse Width (fs) ≤350 ≤500
Pulsewidth Tuning Range N/A
Spatial Mode M
2
<1.3
Burst Mode (pulses at 800 and 1000 kHz) 3, 5
PulseEQ Operation Up to 1 MHz rep rate
Beam Divergence (mrad, 2θ)
≤0.25
Beam Diameter at Output
2
(mm, D4s)
5.0 ±0.5
Beam Circularity
2
(%) ≥85
Polarization Ratio
3
>100:1
Polarization Direction Horizontal
Beam Pointing Stability (urad/K) ≤25
Pulse Energy Stability
4
(%, rms, ±s)
<3
Warm-up Time (minutes)
Cold Start
Warm Start
≤45
≤15
≤60
≤15
Long-Term Pointing Stability (µrad) ±25 over 8 hours
Head Weight 57 kg (125.6 lbs) 60 kg (132.3 lbs)
Power Consumption
5
(typical) (W) <500, 48 VDC <800, 48 VDC
Energy Switching Time (s) <1
1 All specications at maximum pulse energy.
2 Measured 2 m ahead of laser front.
3 External isolation required depending on application.
4 External temp held to ±1°C.
5 Optional 110 to 240 VAC power supply available.
Monaco 345-20-25 Monaco 345-38-30
TYPICAL PERFORMANCE DATA
Pulse Repetition Rate (kHz)
0
7.5
15
22.5
30
Average Power (W)
400 1300 2200 3100 4000
Power (Single Pulse)
Energy (Single Pulse)
0
7.5
15
22.5
30
Pulse Energy (µJ)
Pulse Repetition Rate (kHz)
0
10
20
30
40
Average Power (W)
0
10
20
30
40
Pulse Energy (µJ)
400 1300 2200 3100 4000
Power (Single Pulse)
Energy (Single Pulse)