SALES000078 | Rev. D | Entegris, Inc.
MICROCONTAMINATION CONTROL
Analytical Services
Filter Performance
Testing
Evaluate and validate chemical
filter performance
Entegris Analytical Services is the leader in the measurement
of airborne molecular contamination (AMC) for semiconductor
clean rooms, photolithography applications, and OEM compliance.
Based on more than 30 years of service and chemical filter
development, Analytical Services is one of more than 30 Global
Entegris Labs and provides state-of-the-art AMC analysis for
high-technology environments to ensure confident operation
of cleanroom, supply gases and materials.
APPLICATIONS
—
Following the “See It. Control It.” paradigm, Entegris Analytical
Services naturally comple ments our market-leading chemical
filtration and purification systems and a broad suite of products
for comprehensive contamination control solutions. The service
provides measurements for chemical filter performance testing
and content extraction.
FEATURES & BENEFITS
—
State-of-the-art filter
test facility
Capability to test a variety of standard
and nonstandard filter configurations
Capability to vary flow, humidity and
challenge concentrations for realistic
filter evaluation
Scientific understanding of filter and
AMC chemistry
OEM approved service
Accurate assessment of filter perform-
ance, including remaining filter capacity
and/or postmortem analysis for filter
lifetime extension programs
ISO/IEC 17025 accredited
services — a competence
standard for testing
laboratories
Confidence in data and detection limits
• Detection limits are statistically
evaluated at 99% confidence
• Inter-laboratory comparisons and
traceable standards ensure highest
accuracy
Technical discussion and
consultation available
Enables customized and most eective
contamination control solutions
Cert. 2578.01
Test Filter 1
Test Filter 2
Test Filter 3
Test Filter 4
Test Filter 1
Test Filter 2
Test Filter 3
Gasphase
Challenge
Liquid
Challenge
AMC Monitoring
and Sampling
AMC Monitoring
and Sampling
Exhaust
Chemical Filter
Zero Air Supply
Organics
0.01 2.01 4.01 6.01 8.01 10.01 12.01 14.01 16.01 18.01 20.01 22.01 24.01
Time
0
100
%
SO
2
NH
3
2
SALES000078 | Rev. D | Entegris, Inc.
SPECIFICATIONS
—
AMC CLASS ANALYTES SAMPLE TRAPS ANALYTICAL METHOD
Acids /anions
Fluoride (F-), chloride (Cl-), bromide (Br-),
nitrate (NO
3
-), nitrite (NO
2
-), sulfate (SO
4
2
-),
sulfite (SO
3
2
-), phosphate (PO
4
3
-), acetate
(CH
3
COO-), formate (HCOO-)
DI water impingers
or dry adsorbent
traps
Ion chromatography (IC)
SO
2
– UV absorption
online monitor
Bases /cations
Ammonium (NH
4
+
, NH
3
), amines (R
3-
N);
Na+, K+, Li+, Ca
2
+, Mg
2
+ can be provided
on request
DI water impingers
or dry adsorbent
traps
Ion chromatography (IC)
NH
3
by CRD online
monitor
NH
3
by
chemiluminescence
online monitor
Organics &
refractory
compounds
1
Volatile and condensible organic
compounds from IPA to C26, except
volatile silicon containing compounds.
TruTOC
™
Entegris traps
Gas chromatography/
mass spectrometry with
automated thermal
desorption (GC/MS-ATD)
Toluene – online GC-PID
Toluene by GCFID
LMW silicon
Low molecular weight (volatile) silicon
compounds: TMS, HMDSO, D3
Entegris
proprietary traps
GCMS/liquid micro-
extraction (LME)
TMS and HMDSO by
GC-FID
Physical Specifications
Humidity, flow
and temperature
H
2
O, F, T Online monitors
Sample time
Continuous and as needed to achieve detection limits
Reporting limits
Depending on compound and method
1
Refractory compounds are organic gases containing elements other than C, H, N and O; for example: Si, Al, B, P, S, F, Cl, Br, I, Fe, Sn.