P2 CAP HEAD
SPECIALTY MATERIALS
Overview
Entegris uses its innovative, low-temperature
Plasma Enhanced Chemical Vapor Deposition
(PECVD) process to deposit silicon oxide coatings
for various industrial applications, including semi-
conductor equipment chamber components. The
AR properties of the coating make it suitable for
coating IR optics. The OxiMax
™
coating has low
internal stress and is highly adherent and micro-
conformal to the substrate surface. This coating
is amorphous, highly dense and can be deposited
on a wide variety of substrate materials.
Applications
• Particle reduction during semiconductor
wafer processing
• Oxidation /corrosion resistant
• AR properties make it suitable for coating
IR optics
Features
• Optically transparent
• Excellent breakdown voltage
Ultrapure, transparent silicon oxide coating
OxiMax
™
COATING
Specifications
Substrate: Compatibility Most metals and ceramics
Size Up to 91 cm (36”)
Geometry Any shape, including complex geometries
Structure: Amorphous
Temperature: Deposition Max 150°C (302°F)
Use 1000°C (1832°F)
Coating thickness: A few nm to over 100 µm
Electrical resistivity:
~10
13
Ω-cm
Hardness: 800 HV
Dielectric strength: 80 V/micron
Purity: 99.9995%
Wear resistance: Very good
Corrosion resistance: Excellent aqueous corrosion resistance
Resistant to acids and alkalis
ENTEGRIS, INC.
Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USA
Customer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022
In North America 800 394 4083 | www.entegris.com
©
2008–2014 Entegris, Inc. All rights reserved Printed in USA 6102-5485ENT-0514
Entegris
®
, the Entegris Rings Design
®
, Creating a Material Advantage
®
and OxiMax
™
are trademarks of Entegris, Inc.
For More Information
To learn more about how Entegris’ high-purity
specialty coatings help customers enhance yields,
improve productivity and meet future technolo-
gical needs, call Entegris at +1 781-538-8745.
To review Entegris’ specialty coatings
offering, visit Entegris’ website at
www.EntegrisSpecialtyCoatings.com.
Terms and Conditions of Sale
All purchases are subject to Entegris’ Terms
and Conditions of Sale. To view and print
this information, visit www.entegris.com and
select the Legal Notices link from the footer.
Characteristics
Coating Surface Morphology Coating Cross-section
10
8
6
4
2
0
10
8
6
4
2
0
0
2
4
6
8
10
µm
µm
µm
99.3 nm
0.0 nm
SEM Images of OxiMax Coating
AFM Image of OxiMax Coating
OxiMax