IDT Wafer Dicing Guidelines
© 2016 Integrated Device Technology, Inc.
1
April 1, 2016
Introduction
This guideline describes the requirements for dicing wafers manufactured by IDT. It applies to both IDT internal
sawing operations and to sawing procedures used by customers purchasing un-sawn wafers. Failure to follow
these guidelines could result in lower yields and immediate or delayed operational failures including data loss
particularly failures related to EEPROM data retention.
Disclaim er: T hese dicin g pr actices are ind ustr y standa rd norm s . IDT is not respo ns ible for issues related t o di cing
performed by wafer sawing service providers; it is the responsibility of the customer or subcontractor to ensure
adherence to industry standards.
1 Dicing Guidelines
These industry standard guidelines must be followed for dicing IDT products:
Dicing equipment and all related infrastructure used during sawing processes must meet the common ESD
safety standards of the semiconductor industry.
Ionizers must be installed in areas where sawing processes are completed.
Important Recommendation: The resistivity of water used for sawing or assembly (after CO
2
bubbler) must
be ≤ 0.5 MΩ cm. (IDT requirements exceed the industry standard. The industry standard is approximately
1
M
Ω cm.)
Use contactless wafer mounting.
Use UV tape if die size < 1mm x 1mm.
If using a step cut sawing mode, use a double-spindle sawing machine.
IDT Wafer Dicing Guidelines
© 2016 Integrated Device Technology, Inc.
2
April 1, 2016
2 Relat e d Docum e nts
For product-specific die dimensions and additional important information, please submit a support request at
www.IDT.com/go/support
.
Visit the pr oduct page for the specific IDT IC o n IDT’s websit e www.IDT.com or contact your nearest sales office
for the latest version of this document and the product’s data sheet.
Note: For some products, special precautions are needed before sawing to preserve EEPROM settings. In this
case, the recommended procedures are documented in the product’s data sheet.
3 Document Revi s ion Hist ory
Revision Date Description
1.00 September 11, 2009 First release of document
1.10 November 15, 2013 Addition of requirements for contactless wafer mounting and UV tape.
Addition of equipment requirements when using step cut sawing mode.
Update for contact information and imagery for cover and headings.
Addition of “Related Documents” section.
April 1, 2016 Changed to IDT branding.
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www.IDT.com
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www.IDT.com/go/sales
Tech Support
www.IDT.com/go/support
DISCLAIM ER Integrated Device Techn ol ogy, Inc. (IDT) reserves the right to modi fy the produc ts and/ or s pecifications des c ribed herein at any time, without notic e, at IDT's sole discretion. Perform ance
specifications and operating para met ers of t he desc ribed products are determi ned i n an indepen dent state and are not guara nteed t o perform the s am e way wh en inst alled in cust omer produc ts. The
information contained herein is provided wi thout repres entation or war ranty of any kind, whether expr es s or impli ed, including, but not limited to, the suitability of IDT's products for any particul ar purpose, an
implied warranty of merchant ability, or non-infringement of t he intellectual property rights of others. This doc ument is pres ented onl y as a guide and do es not convey any license under int ellectual proper ty
rights of IDT or any third parties.
I
DT's products are not intended for use in applications involving ex treme envi ronme nt al conditi ons or in life support systems or simil ar devices where th e failure or malf unc tion of an IDT product c an be
reasonably ex pected to significantl y affect the health or safety of users. Anyone using an I D T product in such a mann er does so at thei r own risk, absen t an express , written agreement by IDT.
I
ntegrated Device Techn ol ogy, IDT and the I DT logo are trade marks or registered t rademark s of IDT and its subsidiaries in the United S tates and other countri es. Other tradem ark s us ed herei n are the
property of IDT or their respective third party owners. For datasheet t ype defi nitions and a gl ossary of commo n t erms, visit www.idt.com/go/glossary
. All contents of this document are c opyright of Integrated
Device Technol ogy , Inc. All rights reserved.