S500 Integrated Test System
Administrative Guide
PA-939 Rev. E / September 2017
*PPA-939E* 1
Keithley Instruments
28775 Aurora Road
Cleveland, Ohio 44139
1-800-935-5595
http://www.tek.com/keithley
System description
The S500 Integrated Test System is an instrument-based system configuration from Keithley Instruments used
primarily for semiconductor parametric characterization testing. The S500 has a wide degree of hardware
flexibility, allowing you to configure a system best suited for your applications. The following tables list general
S500 configuration options and configurations used specifically for high-voltage or high-current testing of
high-power semiconductor devices.
S500 system configuration choices
Series 2600 System SourceMeter
®
Instruments
0 to 22*
Any combination of 2612 or 2636 source-measure units (SMUs)
Model 4200-SCS/C Semiconductor
Characterization System
0 to 4*
With 4200-SMUs, 4210-SMUs, 4210-CVU, 4220-PGUs, 4225-PMUs, or
4200-PAs
/F or /C chassis (with or without flat-panel display, respectively)
Switching
One of the following four choices:
1. None
2. 0 to 4 each 708B;* choice of switching card:
a. 1 each 7072
b. 1 each 7072-HV
c. 1 each 7174A
3. 0 to 3 each 707B;* choice of switching cards:
a. 1 to 6 each 7072
b. 45541 to 6 each 7072-HV
c. 1 to 6 each 7174A
4. 0 to 6 each 3706A;* choice of switching cards (per mainframe):
a. 1 to 6 each 3720
b. 1 to 6 each 3721
c. 1 to 6 each 3722
d. 1 to 6 each 3723
e. 1 to 6 each 3730
f. 1 to 6 each 3740
Cabinet selection
37U with or without vented front door
37U with or without advanced seismic securement
23U with or without partially-vented front door
Computer selection – Industrial PC
with RAID Linux
®
or Microsoft
Windows
®
operating system
None
Internal computer
Flat-panel display selection
None
Monitor with support arm
Monitor installed externally
Other options
Adjustable cable support arm
S500 Integrated Test System
2
PA-939 Rev. E / September 2017
*Maximum number depends on system cabinet height of 37U and other items selected
S500 high-power semiconductor testing configuration choices
Series 2600 System SourceMeter
®
Instruments
0 to 3
Either 2612 or 2636 SMUs
2657A High-Power SourceMeter
®
Instruments
0 to 2
(not in series or parallel)
2651A High-Power SourceMeter
®
Instruments
0 to 2
(2 units allow 100 A parallel operation)
C-V Meter (4200-SCS-NOSMU with 4210-CVU)
0 to 1
/F or /C chassis (with or without flat-panel display, respectively)
8020 High-Power Interface Panel
0 to 2
Optional 3 kV C-V hardware
Choice of output connectors (Keithley high-voltage triaxial,
standard triaxial, SHV, or Keysight Technologies
®
high-voltage
triaxial)
Optional unit support arm
8010 High Power Device Test Fixture
0 to 2
Cabinet selection
23U with or without vented front door
Computer selection – Industrial PC with
RAID
(Linux or Windows operating system)
0 to 1. Note that if the 4200-SCS (Semiconductor Characterization
System) is included, this unit serves as the system computer.
Internal or external computer
Flat-panel display selection
None (with 4200-SCS/F-NOSMU option)
Monitor with support arm
Monitor installed externally
Optional accessories
Optional items and accessories that may accompany the S500 system:
Cables to connect to the test fixture or the probe card adapter
9139A-PCA (probe card adapter)
Advanced seismic securement kit
System software options for the S500
Keithley Instruments offers the Automated Characterization Suite (ACS) software for test and prober
automation and parametric device characterization. For Series 2600 wafer-level reliability (WLR) testing,
the optional ACS-2600-RTM can be used with ACS for single device or parallel device testing.
ACS Basic Edition can be used when prober automation is not required.
Independently-developed software can also be used.