HyperRapid NXT 355
UV Picosecond Lasers for Industrial
Micromachining with Maximum Flexibility
HyperRapid NXT is Coherent’s high power industrial picosecond laser
platform, and the benchmark for industrial micromachining applications.
HyperRapid NXT features a compact and modular design with an
identical footprint and electronic interfacing for all power levels and
wavelengths.
Its unique combination of highest laser power and superior exibility
enables optimum process performance under all circumstances:
High average power levels deliver high throughput and minimize
cost-per-part while exibility in repetition rate and pulse energy result
in excellent quality.
The HyperRapid NXT product is backed up with worldwide service
support to match the most demanding uptime and cost-of-ownership
requirements.
FEATURES & BENEFITS
• Single wavelength output: 355 nm
(see separate data sheet for 1064
and 532 nm)
• Unique combination of power
and operational flexibility delivers
significantly reduced cost-per-part
for micromachining applications
• PulseEQ provides equal, perfectly
stabilized pulse energy down to single
shots with maximum timing accuracy
• Compact and light weight, common
interfacing for all models
• Many product support options to
optimize uptime and cost-of-ownership
APPLICATIONS
• Cutting, drilling, selective removal
of complex composite structures
from dissimilar materials, including
oxides, plastics and organics
• Ideally suited for applications in flat
panel display and microelectronics
processing
• Micromachining and structuring of
large surfaces with line focusing or
multiple beams
HyperRapid NXT 355 Datasheet
OPTICAL SPECIFICATIONS
1,2
355-15 355-30 355-30 HRR 355-50
Single Wavelength Output
3
(nm) 355
Power
4
(W) 15 30 50
Pulse Repetition Rate Range (kHz) Single Shot to 4000 Single Shot
to 5000
Pulse Duration
5
(ps) <10
Average Power Stability
6
(RMS 1σ, %) ≤1
Maximum Pulse Energy
7
(µJ) 75 37 75
10
Pulse-to-Pulse Energy Stability
8
(RMS 1σ, %) ≤2
PulseEQ Triggering (kHz) Single Shot to 1600
Beam Quality Parameter (M²) ≤1.3
Beam Diameter, 1 m in front of laser (mm) 5.0 ±0.5
Beam Divergence, full angle (mrad) ≤1
Beam Circularity, 1 m in front of laser (%) ≥85
Beam-Pointing Stability (µrad/°C) ≤50 (peak-to-peak)
Bore Sight Accuracy
Lateral (mm) (beam to specied exit location)
Angular (mrad) (beam to specied exit direction)
≤1
≤5
Direction of Polarization Horizontal
Polarization Ratio >100:1
Warm-up Time from Chiller Start (min.) <45
Electrical Supply 100 to 230V AC/50 to 60Hz/2.5 kW
Mounting Orientation Horizontal
Chiller Water-to-Air or Water-to-Water
Dimensions
Laser Head
Power Supply
SMC Chiller
600 x 780 x 245 mm (23.6 x 30.7 x 9.6 in.)
3U 19” rack
500 x 317 x 615 mm (19.7 x 12.5 x 24.2 in.)
Weight
Laser Head
Power Supply
SMC Chiller
≤67 kg (147.7 lbs.)
16 kg (35.3 lbs.)
43 kg (94.8 lbs.)
BURST MODE OPERATION
Burst Mode Operation Range
9
(kHz) Single Shot to 2500
Maximum Number of Pulses in Burst
9
10
OPERATING SPECIFICATIONS
Allowed Temperature Range During Operation +15°C to +30°C (free of condensation)
Humidity [0-90]% RH, non-condensing, Dew-point <22 °C
1 Due to our continuous product improvement program, specifcations may change without notice.
2 All specications at respective optimized repetition rate.
3 After warm-up time, chiller temperature = 23 ±0.1°C.
4 Maximum power with variable attenuator and process shutter at maximum transmission.
5 UV Autocorrelation at 1 MHz operation.
6 Over 8 hours, ± 1°C ambient temperature.
7 Single-pulse operation (burst number = 1).
8 Steady-state (no pulse gating or change of pulse repetition rate).
9 (Pulse repetition rate) x (number of burst) cannot exceed 5 MHz.
10 Represents typical value at minimal repetition rate based on a specied single pulse energy of 50 µJ at 1.000 kHz.