46
C52_原責
High Power Semiconductor Laser Diode for Fiber Laser
Pumping
Yuji Yamagata,
1
Ryozaburo Nogawa,
1
Yoshikazu Kaifuchi,
1
Syunta Sato,
2
and Yumi Yamada
2
We report performance improvement of single emitter laser diodes based on Asymmetric
Decoupled Confinement Heterostructure (ADCH). Laser design optimization in vertical layer
and lateral current injection structure enabled high power operation of 915 nm laser diodes up
to 17 W and high power conversion efficiency more than 60 %. Mean time to failure of random
mode is estimated to be over 600,000 hours for 17 W operation at room temperature. These
results prove high reliability of ADCH at high power.
1. Introduction
High power semiconductor laser diodes (LDs) with
9xx nm wavelength band have been widely used in in-
dustrial applications. Especially demand for pump
sources in fiber laser systems is increasing rapidly,
because fiber laser systems is replacing conventional
arc welding systems and Yttrium Aluminum Garnet
(YAG) laser systems in material processing
1) 2)
. Our
LD structure is based on Asymmetric Decoupled Con-
finement Heterostructure (ADCH)
3) 4)
. ADCH can re-
alize low internal loss and ultra-low optical confine-
ment, which are essential features required for high
power, high efficiency and high reliability operation
without Catastrophic Optical Damage (COD). In this
paper, high power and high reliability characteristics
are demonstrated for single emitter LDs with 915 nm
wavelength. Future possibility of improvement in high
power operation is also discussed.
2. LD structure and design
Figure 1 and 2 show the cross-sectional structure
and the schematic lateral current blocking structure of
LDs. Vertical structure of the LDs consisting of In-
GaAs/AlGaAs material system is grown by Metal-Or-
ganic-Chemical-Vapor-Deposition (MOCVD). Self-
Aligned Stripe (SAS) structure is used so as to form
lateral current blocking structure as well as non-cur-
rent injection window of laser mirror facets. Front and
rear facets are anti-reflection and high-reflection coat-
ed and applied facet stringent process with our own
technology.
Refractive index and optical mode profiles of wave-
guide in 9xx nm-LDs are shown in Fig. 3. ADCH de-
sign can optimize optical confinement to the active
layer (G
well) and the ratio of optical confinement to p-
doped and n-doped layer (G
p/Gn), independently. The
G
well is a key parameter determining threshold current
and highly related to COD level. the G
p/Gn is a another
parameter related to internal loss thereby it should be
small value. Such a flexible waveguide design realizes
highly reliable operation at high power and high effi-
ciency.
1 Optical Device Research Department, Advanced Technology Laboratory
2 Optoenergy, Inc.
GaAs
p-Ohmic
electrode
p-contact
n-current block
p-clad layer
Active layer
n-wave guide
n-clad layer
n-substrate
n-Ohmic
electrode
GaAs
GaAs
AlGaAs
AlGaAs
AlGaAs
InGaAs-SQW
Fig. 1. Cross section of laser diode.
L
W
s
Fig. 2. Current injection structure of laser diode.
Fujikura Technical Review, 2016
47
3. Performances of Laser Diode
Lasing characteristics and reliability were evaluated
for LDs with 4 mm-long cavity and 915 nm wavelegth
operation. Two different LDs with current injection
stripe widths (W
s) of 100 µm and 150 µm are fabricat-
ed for comparison. They are bonded on high thermal
conductive ceramic base submount for measurement.
Figure 4 shows measured results of light output ver-
sus drive current (L-I) characteristics under CW and
pulsed conditions. The maximum output power of
W
s=150 µm LDs reaches 28 W and 47 W for CW and
pulsed conditions, respectively. COD free operation
up to such high power levels reveals an advantage of
ADCH design in reliability. The maximum output pow-
er of W
s=100 µm LDs is slightly lower due to thermal
rollover. Figure 5 shows power conversion efficiency
(PCE) of LDs with different W
s of 100 and 150 µm.
WPE for both samples exceed 65 % in peak value and
wider stripe sample keeps over 60 % high efficiency up
to high output power of 18 W.
Beam properties of LDs are essential parameter
which dominates coupling efficiency to the output fi-
ber in modules. Figure 6 compares beam parameter
product (BPP) of lateral beam properties for W
s =100
µm and 150 µm-LDs, as a function of output power.
Degradation of BPP from 100 µm to 150 µm stripe
width LDs is smaller than the expectation, because of
better heat dissipation by the ceramic base submount.
Wider stripe configuration is considered to be one of
options to realize high power laser modules.
501052015 3025 40 45350
0
15
10
5
50
45
40
35
30
25
20
Operating current (A)
Light output (W)
915 nm, L=4 mm
Pulse
@RT
CW
150 um
100 um
Fig. 4. CW and pulse L-I characteristics for 4 mm cavity LDs
with 100 µm and 150 µm stripe width.
Active layer (Quantum Well)
Optical mode profile
n-Sidep-Side
n-Clad
G
n
G
p
G
p
<< G
n
G
well
Index
p-Clad
Light lntensity
Index
n-Clad
p-Clad
Band diagram
E
c
E
v
Waveguide
Fig. 3. Schematic index guide structure, optical mode profile
and band diagram of LD.
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0
10
8
6
4
2
18
16
14
12
0
40
30
20
10
90
80
70
60
50
Operating current (A)
Light output (W)
Power conversion efficiency (%)
915 nm, L=4 mm
150 um
100 um
Fig. 5. L-I and WPE-I characteristics for 4 mm cavity LDs with
100 µm and 150 µm stripe width..
Panel 1. Abbreviations, Acronyms, and Terms.
LD
Laser Diode
ADCH
Asymmetric Decoupled Confinement Het-
erostructure
COD
Catastrophic Optical Damage
GaAs
Gallium Arsenide
InGaAs
Indium Gallium Arsenide
AlGaAs
Aluminum Gallium Arsenide
SAS
Self-Aligned Stripe
CW
Continuous Wave
PCE
Power Conversion Efficiency
BPP
Beam Parameter Product
MTTF
Mean Time To Failure