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Wafer Handling robot | IWH
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cHaracteristics
customized designs
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operating hours
specifications
T ±0.02° / ±0.03°
±0.02 mm
Z ±0.02 mm
range
Z
theta 450°
speed
T 180°/s / 360°/s
800 mm/s
Z 425 mm/s
115 – 230 VAC
50 – 60 Hz
500 VA (standard)
550 VA (advanced)
Main interface
Weight
iWH ta13s24Hdp f-3
dimensions
7“ [372,5mm]
10“ [449mm]
13“ [525mm]
17“ [576mm]
21“[677,6mm]