1
Koganei Clean System products
provide complete support for the
maintenance of a clean environ-
ment inside the cleanroom.
Koganei Clean System products meet the needs of the ultra-clean production envi-
ronment. In everything from actuators and valves to air preparation and auxiliary
equipment, anti-corrosion materials processing and other Koganei-developed design
concepts serve to prevent particle contamination within the cleanroom. These per-
fectly designed mechanisms, which resolve even the slightest leaks to the outside
during operations, have already won a high level of reliability.
Koganei Cleanliness
There is currently no standard in JIS or elsewhere for methods of evaluating cleanliness for pneumatic equipment in the
cleanroom specifications. Therefore, to measure the effects of cleanroom contamination by pneumatic equipment, Koganei
has decided to use “number of particles generated per 10 operations,” rather than particle density. Koganei has also devel-
oped classifications for application classes in cleanroom, based on JIS and other upper limit density tables, and on the
company’s own experience.
Remarks: 1. In the above table, product performance in terms of the number of particles generated per 10 operations is
expressed as the upper limit of particles corresponding to the equivalent JIS or ISO class.
2. In the above table, values in the JIS, ISO, and FED-STD upper limit density tables are calculated as upper
density per liter.
3. The classes shown are clean levels as classified in JIS and ISO.
From the above definitions, the Koganei clean level classes can be viewed as the level of average contamination per liter of surround-
ing air over a period of 10 operations in cleanroom. Air ventilation in cleanrooms is usually faster than 1 cycle per minute, and clean vol-
umetric capacity is usually larger than 1 liter, which should provide a sufficient safety margin in practice.
Caution: The above conclusions are based on an ideal situation in which air ventilation is being implemented. For specific cases where
air ventilation is not ensured, caution is needed since the clean classes cannot be maintained.
0.001
0.1 1.0（φ）0.5
0.01
0.1
1
10
100
1000
Particle generation classification of Koganei pneumatic equipment
Particle diameter (
μ
m or larger)
Class 6 equivalent (Corresponds to FED-STD209E Class 1000)
Class 5 equivalent (Corresponds to FED-STD209E Class 100)
Class 4 equivalent (Corresponds to FED-STD209E Class 10)
Class 3 equivalent (Corresponds to FED-STD209E Class 1)
Total number of particles
(per 10 operations)
The clean system diagrams shown here are for Class 5 equivalent products.
For Class 4 or Class 3 equivalent products, consult us.
2
Evaluations of Cleanliness
Koganei has therefore specified its in-house measurement methods, to conduct evaluations on the cleanroom rating.
The number of particles of the Air Cylinder Cleanroom Specification is measured as shown in the method below.
1. Measurement conditions
1-1 Test circuit: Figure 1 (no suction), Figure 2 (with suction)
1-2 Operating conditions of tested cylinder
Operating frequency: 1Hz
Average speed: 500mm/s [20in./sec.]
Applied pressure: 0.5MPa [73psi.]
Suction condition: Microejector ME05, Primary side: 0.5MPa [73psi.] applied, Tube:
φ
6 [0.236in.]
Mounting direction: Vertical
Chamber volume: 8.3
R [0.293ft.
3
]
2. Particle counter
Manufacturer/model: RION/KM20
Suction flow rate: 28.3
R/min [1ft.
3
/min.]
Particle diameter: 0.1
μm, 0.2μm,0.3μm,0.5μm,0.7μm,1.0μm
3. Measurement method
3-1 Confirmation of number of particles in the measurement system
Under the conditions in the above 1 and 2, using a particle counter to measure the sample for 9 minutes without operating the
measurement sample, and confirmed the measured number of particle is 1 piece or less.
3-2 Measurement under operation
Under the conditions in the above1 and 2, operating the measurement sample for 36 minutes, and measured the total values in
the latter half of 18 minutes test.
3-3 Reconfirmation
Performed the measurement in 3-1 again, to reconfirm the number of particles in the measurement system.
4. Measurement results
Cleanroom Class 7 equivalent
(Corresponds to FED-STD209E Class 10000)
Cleanroom Class 7 equivalent
(Corresponds to FED-STD209E Class 10000)
INLET
INLET
Measurement chamber
Particle counter
Clean air
Class 1
Figure 1 (no suction from dust collection port)
Clean air
Class 1
Measurement
chamber
Particle counter
Micro ejector
Figure 2 (with suction from dust collection port)
0
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0（φ）
1
10
100
1000
Particle generation over 1 million operations (CS-CDA16×30)
Class 5 equivalent: upper limit
(Corresponds to
FED-STD209E Class 100)
0
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0（φ）
1
10
100
1000
Particle generation over 1 million operations (CS-DA20×100)
Particle diameter (μm or larger)
Total number of particles
(per 10 operations)
Particle diameter (μm or larger)
Total number of particles
(per 10 operations)
● Cleanroom specification
Jig Cylinder (no suction from dust collection port)
● Cleanroom specification
Slim Cylinder (with suction from dust collection port)
Class 5 equivalent: upper limit
(Corresponds to
FED-STD209E Class 100)