Overview
As semiconductor tools and process power components age,
factories are seeing increases in failure rates and repair costs
of those components. A retrofit of your existing RF generator to
a Paramount provides a reset of the unit life, and an upgrade in
unit capability and reliability. A retrofit maximizes tool uptime
while reducing overall maintenance costs.
Many installed RF generators are discontinued, aging, or
becoming difficult and costly to repair. Retrofitting with an AE
Paramount is the preferred service option as:
Used equipment available on the market is in unknown
condition
Repairing existing units could be limited in the future due to
obsolete components
Total Cost of Ownership (TCoO)
TCoO in the process power space on a semiconductor tool
extends beyond the transactional cost of a repair:
Tool down time: lost production dollars
Wafer scrap
Wafer yield
Operational costs (efficiency)
Benefits
Increased uptime with longer mean time between
failures (MTBF)
Lower overall maintenance costs
I
mproved performance, equivalent to processes on new
tools
Additional features allow for enhanced process control
or new process development
Higher efficiency for decreased operating costs
Enhanced plasma stability and process repeatability
CEX and pulsing options available
Features
Includes
12-month, whole-box warranty
Supports wafer fabrication with partnership of AE
refurbishment experts
Resets the clock on aging tools
Provides cost-effective, modern replacement for
discontinued or aging process power components
Presents an efficient upgrade process that is replicable
for subsequent tools
Retrofit kit designed to be a seamless replacement
Retrofit: 2 MHz, 13.56 MHz and 27.12 MHz
RF Generators
Simple solutions for replacing your aging RF generators with a modern replacement
advancedenergy.com
The Advanced Energy (AE) Retrofit Program aims to replace existing generators of any make and model
with a new AE product. By retrofitting your existing, aged 2 MHz, 13.56 MHz or 27.12 MHz RF generator with
a new Paramount® generator, Total Cost of Ownership improvements can be realized through reduced tool
down time, improved process and wafer yields, and efficiency gains.
Return on Investment (ROI)
1
The AE Quality Advantage – Maximizing Uptime
Feature Existing RF Generator Paramount Benefits to Retrofit
Frequency 1.8 to 2.17 MHz
12.882 to
14.238 MHz
27.12 MHz
1.8 to 2.17 MHz
12.882 to
14.238 MHz
27.12 MHz
No change to frequency
Output Power 2500 W / 5000 W
2500 W
2500 W / 5000 W
2500 W
No change
Power Accuracy ± 1% ± 1% Tight process control
Reflected Power 500 W 500 W No change
Sag/Surge Protection Not Available SEMI 47 Fewer process interruptions
Pulsing Single Level Pulsing Single Level
Pulsing
Optional Multi Level Pulsing Additional capabilities
provided
Analog Interface 25 pin D-sub 25 pin D-sub No change to analog interface
RF Output Connector Type N Female C-Type Type N Female Type HN Female Adapter provided, if required
Input Power 208 V, 3ph 208 V, 3ph No electrical panel rewiring
required
Height 5.25" 8.72" 5.25" 5.23" 5.04" Retrofit product fits in
standard 19" rack, but rack ear
extensions can be provided for
any mismatched dimensions
Width 19" 17.7" 8.5" 19.04"
Depth 20.5" 22.1" 22.3" 17.4" 26.6"
Weight 55 lbs 90 lbs 60 lbs 35 lbs 60 lbs Paramount is typically lighter
Cooling Water Water and Air Same cooling method
Coolant Rate 2 gpm 2 gpm No change to water
consumption
Water Fittings ¼" NPT ⅜" NPT ⅜" NPT Adapter provided, if different
Efficiency < 50% > 65% Decreased operating costs
Specification Comparison – 2 MHz, 13.56 MHz, and 27.12 MHz RF Generators to Paramount
Each retrofit kit contains all required interfaces and adapters, making the transition to a newer product seamless by
eliminating unexpected equipment changes.
Get in Touch
To learn more about your retrofit options, contact Advanced Energy Technical Support at technical.support@aei.com or reach out
to your local Service Center.
North America +1.800.446.9167
Europe +49.7123.969.492
China +86.755.26728187
Japan +81.42.512.8440
Korea +82.31.777.9191
Singapore +65.6561.6482
Taiwan +886.2.8221.5599
©2020 All rights reserved. Advanced Energy®, AE®, and Paramount® are trademarks of Advanced Energy Industries, Inc.
Advanced Energy Industries, Inc., Worldwide Headquarters 1625 Sharp Point Drive, Fort Collins, Colorado 80525
With a retrofit to a Paramount product:
Save up to 60% annually on repair and maintenance costs with new units
2
See a five-year ROI
3
of 211%
Break even in 1.61 years
1
Figures are for illustrative purposes only. Contact AE for a customized ROI calculation specific to
your install base. Trade-in and volume discounts are also available.
2
Annual savings achieved through reduced tool downtime, improved process and wafer yields, and
efficiency gains.
3
Figures calculated off of 30-unit population.