©2020 Advanced Energy Industries, Inc.
Introduction
Advanced Energy (AE) offers a full lineup of RF plasma
generators with many different features, mounts, sizes, and
control methods. This application note is intended to provide
a clearer picture of the AE RF generator options and highlight
which is the best fit for various applications.
For this discussion, we will focus on the two most popular
Advanced Energy 13.56 MHz generators: Apex and
Paramount. Both generators offer unparalleled stability,
reliability, and precise process control. However, there are key
differences that should be considered when selecting the
appropriate product for your specific application.
Apex and Paramount
RF Generator Comparison
APPLICATION NOTE
2 advancedenergy.com
APEX AND PARAMOUNT RF GENERATOR COMPARISON
Apex Fundamentals
The Apex product line was first introduced in 2000, but continued market demand drove
Advanced Energy to begin a Refresh Initiative in 2015 to address parts obsolescence in order to
continue manufacturing Apex. The refresh result is an Apex generator that retains its RF section
but has an updated logic section, similar to the Paramount. The Apex Refresh consists of two
main sections: the RF section and the logic section.
The RF section contains a three-phase rectifier, RF power amplifier, driver/exciter, and a RF
measurement system. The three-phase rectifier creates the BUS voltages (±150 VDC) which are
the direct drivers of the RF output voltage. The driver/exciter isolates the 13.56 MHz signal and the
RF amplifier changes the RF output amplitude to meet the setpoint across the full output power
range. The RF measurement system consists of a directional coupler which measures the output
signal and completes the power feedback loop for the RF amplifier.
Mother Board/Logic Board
AC
RF
Output
+
CEX Forward/Reflected Power
Pulse
Line Filter
Optional
Circuit Breaker
RFA Card
3φ Bridge
Rectifier
DC Bus Filter
Driver/Exciter
CEX
RS 232
Ethernet
Analog I/
O
DNET
Profibus
Power
Amplifier
Optional
Impedance
Matching
VI Coupler
24 V
Transformer
Optional
CEX and LED
Card
Micro-
processor
Optional
User I/O Card
Analog Card
Figure 1. Apex Refresh block diagram