APEX
®
RF GENERATORS AND
POWERDELIVERY SYSTEMS
Sophisticated RF Conversion Technology
Benefits
• Higherpowerdensity
• Improvedprocessexibility
• Increasedyield
• LowerCoO
• Simpliedprocesstool
integration
• Flexiblecommunications
Features
• Streamlineddesign
• On-boardchambermount,
on-toolframemount,rack
mount,andshoeboxoptions
• Widebandcontrolloopsand
optional,high-repetition-rate
pulsing
• Industry-leadingarc
management
• Regulatorycompliant
APEX
®
RF GENERATORS
AND POWERDELIVERY SYSTEMS
TheversatileApex
®
familyofRFgeneratorsprovidesremarkablyhighpowerdensity
andpower-deliveryconsistency.SophisticatedRFconversiontechnologynotonly
oersenhancedproduct���andprocessreliabilitybutalsoincreasescosteectiveness
byeliminatingtheneedforfront-end,DC-to-DCconversioncomponents.
Exceptionallyfastandsensitivearc-handlingtechnologyalsoincreasesyieldand
lowersCoO.Forsuperbperformanceinplasma-based,thin-lmprocessesfor
semiconductor,atpaneldisplay,ordatastoragemanufacturing,theApexplatform
istheidealchoice.Withitsunique,modulardesign—inapackagesotrimitcanbe
mounteddirectlyonthechamber—theApexplatformisalsohighlycustomizable
tosuityourspecicprocessneeds.
Innovative RF Technology
2
Comprehensive, Configurable Feature Set
AdvancedRFMeasurement HALO
(HighAccuracyLowOutput)
CEX
InputVoltage
(NominalVAC)
Pulsing CustomAnalogI/O
Packaging CustomSerialI/O CustomPowerOutput
(Watts)
SelectableOutput
Connector Type
SelectableACPowerInput
Connector Type
Industry-LeadingArc
Management
Water-FittingThreads VFP
Typical Market Applications
TheApexplatform’seld-proven,superbperformanceinplasma-based,thin-lmprocesses
makesitidealinmanufacturingprocessesfor:
LeveragingtrulyinnovativeRFconversion
technology,theAdvancedEnergy
®
(AE)
ApexfamilyofRFgeneratorsprovides
higherpowerdensity,greaterdelivered
powerrepeatability,increasedreliability,
andsuperiorreturnoninvestment(ROI)
comparedtoconventionalRFgenerators.
TheApexplatformincludesrack-mountable
1.5to10kWmodels.Acomprehensive
setofcongurablefeaturesallowsyou
tocustomizetheApexplatformtosuit
yourspecicprocessneeds.Theresultis
acompletelycustomizedunit—without
lengthycustom-generatorleadtimes.
• Semiconductors
• Flatpaneldisplays
• Datastoragedevices
• Solarcells