MICRO PMT ASSEMBLY
MICRO PMT MODULES
MICRO PMT PHOTON COUNTING HEAD
World's smallest and lightest photomultiplier tube
*
Micro PMT
Easy to
mass produce
Micro PMT can be produced in high
volume while still maintaining high
reliability and performance. What
makes this possible is overall inte-
grated usage of our in-house ad-
vanced technologies for MEMS (mi-
cro-electro-mechanical systems),
semiconductor manufacturing, elec-
tron trajectory design, vacuum
sealed packaging, and va-
cuum processing.
High shock
resistance
Micro PMT devices offer strong
shock resistance since anodic bond-
ing by MEMS technology is utilized
to join the silicon substrate to the
glass substrates. This high cushion-
ing or shock resistance makes
them ideal for developing high-per-
formance, hand-held testing
and analysis devices.
High sensitivity
and fast response
Micro PMT utilizes the same high
precision structure for electrode
arrangement as conventional
PMTs and so provides the high
sensitivity and fast response nee-
ded from a PMT.
Customizing
support
Feel free to consult with us on
customizing to match customer
usage conditions and environ-
ments.
Tiny dimensions
Micro PMT has a three-layer
structure where a silicon sub-
strate is sandwiched between
two glass substrates. Utilizing
only three components gives
tiny dimensions impossible up
until now.
* By our research (as of December 2015)
Micro PMT internal structure
CONNECTION TERMINAL
VACUUM TUBE
SECONDARY ELECTRON
VACUUM
ANODE
LAST DYNODE
ELECTRON MULTIPLIER (DYNODES)
DIRECTION
OF LIGHT
PHOTOCATHODE
FOCUSING
ELECTRODE
SILICON
PHOTOCATHODE
ANODE
GLASS
PHOTOELECTRON
[TOP VIEW] [SECTIONAL VIEW]
GLASS
ELECTRON MULTIPLIER (DYNODES)
Full-scale Micro PMT image!
Micro PMT works on the same vacuum tube
technology and principle as conventional PMTs
and so can deliver the same performance as
conventional PMT yet in a compact and light-
weight unit.