Silicon Microstructures, Inc. 2001-2016. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS9541.04
SM9541 Series
Ultra-Low Pressure
Digital Sensor
DESCRIPTION
The SM9541 Series is a digital, low pressure MEMS sensor family
offering state-of-the-art pressure transducer technology and CMOS
mixed signal processing technology to produce a digital, fully
conditioned, multi-order pressure and temperature compensated
sensor in JEDEC standard SOIC-16 package with a dual vertical
porting option. It is available in both compound gage or differential
pressure configurations. With the dual porting, a vacuum-gage
measurement is possible to minimize altitude errors due to changes
in ambient pressure.
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FEATURES
• Fully digital, pressure calibrated and temperature compensated output
• I
2
C Digital Interface
• Compensated temperature range: -5 to 65
o
C
• Compound gage and differential pressure configurations
• Insensitive to mounting orientation
• Robust JEDEC SOIC-16 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards
• RoHS & REACH compliant
• Pressure ranges from 10 cmH
2
O to 140 cmH
2
O (0.14 to 2 PSI)
Combining the pressure sensor with a signal-conditioning ASIC in a
single package simplifies the use of advanced silicon micro-machined
pressure sensors. The pressure sensor can be mounted directly on a
standard printed circuit board and a high level, calibrated pressure
signal can be acquired from the digital interface. This eliminates the
need for additional circuitry, such as a compensation network or
microcontroller containing a custom correction algorithm.
The SM9541 is shipped in sticks or tape & reel.
Medical Industrial Consumer
Sleep Apnea Airflow Measurement Sports Equipment
CPAP Pneumatic Gauges Appliances
Ventilators Pressure Switches
Gas Flow Instrumentation Safety Cabinets
Air Flow Monitors Life Sciences
Negative Pressure Wound Therapy Gas Flow Instrumentation
Silicon Microstructures, Inc. 2001-2016. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS9541.04
SM9541 Series
www.si-micro.com
Absolute Maximum Ratings
All parameters are specified at Vdd = 3.3 V supply voltage at 25
o
C, unless otherwise noted.
No. Characteristic Symbol Minimum Typical Maximum Units
1 Supply Voltage V
DD
6.00 V
2 Supply Current I
VDD
4.00 mA
3 Update Period 2 mS
4 Operating Temperature
(a)
T
OP
-5 32 +65 °C
5 Storage Temperature
(a)
T
STG
-40 - +125 °C
6 Media Compatibility
(a,b)
No. Product Number Operating Pressure
Proof Pressure
(P
ROOF
)
(a,c)
Burst Pressure
(P
ROOF
)
(a,d)
7 SM9541-010C-S-C-3-S -0.5 to 10 cmH
2
O
±1.5 PSI ±3.0 PSI
8 SM9541-010C-D-C-3-S -10 to 10 cmH
2
O
9 SM9541-020C-S-C-3-S -1 to 20 cmH
2
O
±4.8 PSI ±6.0 PSI
10 SM9541-020C-D-C-3-S -20 to 20 cmH
2
O
11 SM9541-040C-S-C-3-S -5 to 40 cmH
2
O
12 SM9541-040C-D-C-3-S -40 to 40 cmH
2
O
13 SM9541-060C-S-B-3-S* -5 to 60 cmH
2
O
14 SM9541-100C-S-B-3-S* -5 to 100 cmH
2
O
±12 PSI ±15 PSI
15 SM9541-100C-S-C-3-S -5 to 100 cmH
2
O
16 SM9541-100C-D-C-3-S -100 to 100 cmH
2
O
17 SM9541-140C-S-C-3-S -20 to 140 cmH
2
O
Notes:
a. Tested on a sample basis.
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
Notes:
a. Tested on a sample basis.
b. Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy, RTV, gold,
aluminum, and nickel.
*Prerelease product - The device has not been released to production.
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