LDLS™
Selection
Guide
EQ-99X
Compact, High-Brightness
Source with window
output for free-space
optics coupling
~0.5W
~10 mW/mm
2
.sr.nm
Point source with 0.47N
diverging beam for
collection by free-space
optic. (SM1 thread)
Air-cooled
Broadband spectrum, 170nm–2100nm; (190nm–2100nm for EQ-99XFC) Long-life bulb
UV-Vis
Spectroscopy
Optics Testing
Analytical
Instrumentation
Monochromater Source
Model
General
Characteristics
Typical Broadband
Optical Power
Typical Spectral
Radiance/Brightness
(Depending on Wavelength)
Optical Interface
Cooling System
Common Features
Applications
EQ-99XFC
Compact, High-
Brightness Source
with fiber optic
coupled output
~80mW (from 230µm
diameter fiber, 0.22NA)
~60 µW/nm (from 230µm
diameter fiber, 0.22NA)
Standard FC connector
for connection to fibers
up to 1mm diameter
Air-cooled
UV-Vis
Spectroscopy
Fiber Optic Testing
Thin-film
Measurement
Turn-key Systems
EQ-400
Highest Brightness,
High Power Source with
dual window output
for free-space optics
coupling
~15W
~100mW/mm
2
.sr.nm
Point source with 0.5NA
diverging beam from
front and back windows.
Optional retro-reflector
Water-cooled. Requires
chiller (available from
Energetiq)
Semiconductor
Metrology
Materials
Characterization
Advanced Imaging
Thin-film Measurement
EQ-77
Highest Brightness,
High Power Source with
single-beam output and
retro-reflector
~2W
~40 mW/mm
2
.sr.nm
Point source with 0.5NA
diverging beam from
front and back windows
Water-cooled. Requires
chiller (available from
Energetiq)
Semiconductor
Metrology
Optical Testing
Advanced Imaging
Thin-film
Measurement
Note: Performance measures mentioned in this Selection Guide are typical values for guidance in the selection and use of
LDLS™ products. They are not to be taken as specifications. Please contact Energetiq for further details: info@energetiq.com
Energetiq Technology, Inc.
7 Constitution Way
Woburn, MA 01801
Specifications are subject
to change without notice.
LDLS SG—5/17
©2017 Energetiq Technology, Inc.
All rights reserved.
Phone: +1 781-939-0763
Fax: +1 781-939-0769
Email: info@energetiq.com
www.energetiq.com
About Energetiq
Energetiq Technology, Inc. is a developer and manufacturer of advanced light sources that enable the analysis and
manufacture of nano-scale structures and products. The Energetiq team combines its deep understanding of the
high power plasma physics needed for high-brightness light generation with its long experience in building rugged
industrial & scientific products. The result is that users can expect the highest levels of performance combined with
the highest reliability.
Ultra-High Radiance Broadband Light Sources
Energetiq Technology is a developer and manufacturer of
advanced light sources that produce high radiance light in
the 170nm to 2100nm wavelength range with high reliability,
high stability, and long life.
• Broadest wavelength range: 170nm - 2100nm
• Replaces Deuterium, Tungsten/Halogen and Xenon arc lamps
• Highest brightness and radiance with exceptional stability
• Electrodeless operation reduces consumable cost and
minimizes recalibration
• Industry standard in semiconductor wafer fabs worldwide
• Operates 24/7/365 with high reliability
High-Intensity Xenon Plasma