Features and Benefits
• Radiance >40mW/mm².sr.nm (wavelength dependent)
- Fastest measurements
• Very low noise and excellent spatial stability
- Precise & repeatable results
• Dual beam output or higher-output Single-beam
(using integrated Retro-reflector) for flexibility
- For optical flexibility
• Compact lamphouse with water-cooling and
clean construction
- Long life and stability
• Extreme high brightness across broad spectrum
- UV-Vis-NIR (170nm – 2100nm)
• Electrodeless operation
- Long life and low cost of ownership
• Electronic optical output control
- Light attenuation
EQ-77 LDLS
™
High-Brightness, Long-Life, Broadband
Laser-Driven Light Source
Applications
• Semiconductor Metrology & Inspection
• Monochromator Source
• UV-Vis-NIR Spectroscopy
• Photoemission Electron Microscopy (PEEM)
• Materials Characterization
• Advanced Imaging
• Thin Film Measurements
Based on the highly successful Laser-Driven Light Source
(LDLS) technology, the EQ-77 offers the highest radiance and
irradiance available in a truly broadband white light source.
The EQ-77 features a compact lamp house, with clean con
-
struction that ensures long life and ultimate stability. With
a 170nm- 2100nm wavelength range, and a choice of source
dual-beam output or a single-beam output with retro-reflector,
the EQ-77 is flexible for a broad variety of applications.
Researchers using light for imaging and analytical spectroscopy
in a variety of applications in the life sciences and materials
sciences need light sources capable of providing extreme high
brightness and power across a broad wavelength range.
Traditionally, multiple lamps (Tungsten/Halogen, Xenon-arc,
Deuterium) have been used to cover this broad spectral range.
However, combining multiple lamps is costly and optically in
-
efficient, and the use of electrodes within these lamps limits
their ability to achieve the high brightness or power needed
for the most demanding applications. Furthermore, traditional
electrode-driven light sources have short life, need to be
changed frequently, and during their life the lamp output
declines constantly.
To address this problem, Energetiq has developed a revolu
-
tionary single light source technology called the LDLS™ Laser-
Driven Light Source* that enables extreme high brightness, with
a relatively flat spectrum, from 170nm through visible and
beyond, combined with life time an order of magnitude longer
than traditional lamps. The LDLS technology is fully embodied
in the EQ-77 — an extremely bright and stable, compact CW
broadband source that is specifically designed for critical
spectroscopic and imaging applications.
* Multiple Patents Worldwide
Energetiq Technology Inc.
7 Constitution Way
Woburn, MA 01801
Specifications are subject
to change without notice.
LDLS EQ77—7/2016
©2016 Energetiq Technology, Inc.
All rights reserved.
Phone: +1 781-939-0763
Fax: +1 781-939-0769
Email: info@energetiq.com
www.energetiq.com
Specifications
EQ77 Spectral Radiance
Overview
Physical Specifications
EQ-77 System Dimensions (H x W x D) Weight
• Lamp House 135.6mm x 144.9mm x 56mm 2.7 kg (6.0 lb)
• Laser Drive Module 132.6mm x 482.6mm x 583.6mm 18.8 kg (41.5 lb)
Utility Requirements
• Electrical 100-240 VAC, 350W max.
• Cooling Water 1.0 liter/min (.27 gal/min)
• Purge Nitrogen: 190 sccm @ 20psig; Grade 6 recommended
• Compliance CE Mark
About Energetiq
Energetiq Technology, Inc. is a developer and
manufacturer of advanced light sources that en-
able the analysis and manufacture nano-scale
structures and products. The Energetiq team
combines its deep understanding of the high
power plasma physics needed for high-brightness
light generation with its long experience in build-
ing rugged industrial & scientific products. The re-
sult is that users can expect the highest levels of
performance combined with the highest reliability.
Patent Numbers: US: 7435982; 7786455; 8525138; 8969841; 9048000; 9185786 -- Japan: 5410958; 5628253 -- Korea: 10-1507617 -- UK: GB2450045 -- Other Patents Pending
• CW spectral output from 170nm - 2100nm
• Large collectable view angle – Numerical Aperture (NA): up to 0.50 both sides
• Typical bulb life >9,000 hrs.
• Flexible optical interface for single or dual beam output
• Electronic output control for light attenuation
1
10
100
1000
190 290 390 490 590 690 790 890
Wavelength (nm)
EQ77 Spectral Radiance
Spectral Radiance [ mW/mm
2
.sr.nm]
EQ-77 lamp
house with
power supply