MICRO PMT ASSEMBLY

MICRO PMT MODULES

MICRO PMT PHOTON COUNTING HEAD

World's smallest and lightest photomultiplier tube

*

Micro PMT

Easy to

mass produce

Micro PMT can be produced in high

volume while still maintaining high

reliability and performance. What

makes this possible is overall

integrated usage of our in-house

advanced technologies for MEMS

(micro-electro-mechanical systems),

semiconductor manufacturing,

electron trajectory design,

vacuum sealed packaging,

and vacuum process-

ing.

High shock

resistance

Micro PMT devices offer strong

shock resistance since anodic

bonding by MEMS technology is

utilized to join the silicon substrate

to the glass substrates. This high

cushioning or shock resistance

makes them ideal for developing

high-performance, hand-held

testing and analysis

devices.

High sensitivity

and fast response

Micro PMT utilizes the same high

precision structure for electrode

arrangement as conventional

PMTs and so provides the high

sensitivity and fast response

needed from a PMT.

Customizing

support

Feel free to consult with us on

customizing to match customer

usage conditions and environ-

ments.

Tiny dimensions

Micro PMT has a three-layer

structure where a silicon

substrate is sandwiched

between two glass substrates.

Utilizing only three components

gives tiny dimensions impos-

sible up until now.

* By our research (as of December 2015)

■ Micro PMT internal structure

CONNECTION TERMINAL

VACUUM TUBE

SECONDARY ELECTRONS

VACUUM

ANODE

LAST DYNODE

ELECTRON MULTIPLIER (DYNODES)

DIRECTION

OF LIGHT

PHOTOCATHODE

FOCUSING

ELECTRODE

SILICON

PHOTOCATHODE

ANODE

GLASS

PHOTOELECTRON

[TOP VIEW] [SECTIONAL VIEW]

GLASS

ELECTRON MULTIPLIER (DYNODES)

Full-scale Micro PMT image!

Micro PMT works on the same vacuum tube

technology and principle as conventional PMTs

and so can deliver the same performance as

conventional PMT yet in a compact and

light-weight unit.