Multichannel Converter
●Product Features
■Highly accurate and repeatable across full temperature range
■Probes and converters are fully interchangeable
■Systems do not require recalibration
■Excellent sensor-to-sensor precision
●Key Benefits
■Obtain accurate and reliable temperature measurement in plasma-assisted semiconductor processes
■Achieve greater process uniformity and repeatability
■Enable advanced process performance
■Reduced form factor and cost per measurement point
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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665 KB |
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